I do things like this for a living as a consultant. I am not that
expensive and guarantee my work. (I don;t think there are any other
consultants that do this!!)
My site is
formatting link
If you are trying to etch a thin film then its important to know
details such as how the film was originally deposited and what other
compounds or elements are present.
You mention lithium Cobalt. Is this a metallic fhin film that has
both Li and Co in it? or are these oxides.
Is this a Lithium salt?
Please provide greater detail and send to my email address
snipped-for-privacy@entropyltd.net
but I would suspect that you could etch the film but should be
concerned with its application and the after effects of the etching
process. should it render the thin film usable after etching.
be careful with temperature and you might wish to buffer your
solution so as to keep the etch rate constant between the two
materials. You might differentially etch them and there is a
difference between etching and removal. You can probably remove them
with NH4 OH but I assume you wish to finesse this and get to a certain
depth.
Again let me know and maybe I can help
Thank you for your help. At this time I really want to just completely
remove the LiCo from alumina ceramic, to possible reuse them......not sure
if its suitable, but worth a shot. The thickness of the thin film is about
20K Angstroms
Thanks
Kitty
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