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Selective etch of SiO2 over SiCr

Hi,

Does anyone know of a good selective etch (either dry or wet) that etches SiO2 (or SiNx) but stops on SiCr (or other thin film resistor materials such as WSi2)? Will BOE work?

thanks Erji

Reply to
erji.mao
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BOE would work but would most likely attack the SiCr. Why not put an "etch stop" layer between these films ---something that BOE would not etch and then etch the etch stop away with another etch that does not attack Si Cr??

Kitty

Reply to
Kitty

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