Shear modulus of Si3N4

Does anyone have a reference for the shear modulus (G) of LPCVD silicon nitride?
Thank you, Arthur Beyder SUNY at Buffalo

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Stoichiometric Si3N4 has an estimated shear modulus of about 119 GPa. Be careful, however, because LPCVD silicon nitride can be made in various atomic ratios - some with oxygen. You may wish to have your particular material measured by obtaining the transverse and longitudinal velocities of sound and computing the various moduli from them.
Chuck Szmanda

nitride?
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