Does anyone have a reference for the shear modulus (G) of LPCVD silicon nitride?
Thank you, Arthur Beyder SUNY at Buffalo
Shear modulus of Si3N4
May 02, 2004
1 Replies
Stoichiometric Si3N4 has an estimated shear modulus of about 119 GPa. Be careful, however, because LPCVD silicon nitride can be made in various atomic ratios - some with oxygen. You may wish to have your particular material measured by obtaining the transverse and longitudinal velocities of sound and computing the various moduli from them.
Chuck Szmanda
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