Coating for aluminum vacuum chamber

Jan 15, 2008 3 Replies
J

Does anyone have tried and experienced a good coating for aluminum vacuum chamber? In fact, I am looking for a corrosive resistant, abrasive resistant coating that would not cause any outgassing or water adsortion as anodized aluminum. The chamber is submitted to 10-3 torr vacuum and involves the use of moisture for a specific process. Relative humidity is the primary key for process repeatability. Anodized layer failed in this situation since it reacts differently depending of the exposed environmentr : temperature, saturation level, outside RH% ...



Thanks, JM


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M

I haven't used it, but this sounds like an application for Parylene.

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J

Any other suggestions, Parylene is not Abrasive Resistant!

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P

What are you planning to do to it? Why is abrasion resistance important in a vacuum chamber?

If you just want to be able to get films off the walls of your evaporator, then use (a) aluminum foil shields that you can throw away, with a mirror inside the chamber for direct viewing, or (alternatively) some Bell Bright spray coating (which you can get from Duniway Stockroom, iirc).

If this is something more involved, e.g. a RIE chamber or (horrors) UHV, then I don't know--all the UHV stuff I've seen has been stainless steel.

Cheers,

Phil Hobbs

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