1. Home
  2. ⚗ Material Sciences
  3. Coating for aluminum vacuum chamber

Coating for aluminum vacuum chamber

Does anyone have tried and experienced a good coating for aluminum vacuum chamber? In fact, I am looking for a corrosive resistant, abrasive resistant coating that would not cause any outgassing or water adsortion as anodized aluminum. The chamber is submitted to 10-3 torr vacuum and involves the use of moisture for a specific process. Relative humidity is the primary key for process repeatability. Anodized layer failed in this situation since it reacts differently depending of the exposed environmentr : temperature, saturation level, outside RH% ...

Thanks, JM

Reply to
jmvallieres
Loading thread data ...

I haven't used it, but this sounds like an application for Parylene.

formatting link

Reply to
Mark Thorson

Any other suggestions, Parylene is not Abrasive Resistant!

Reply to
jmvallieres

What are you planning to do to it? Why is abrasion resistance important in a vacuum chamber?

If you just want to be able to get films off the walls of your evaporator, then use (a) aluminum foil shields that you can throw away, with a mirror inside the chamber for direct viewing, or (alternatively) some Bell Bright spray coating (which you can get from Duniway Stockroom, iirc).

If this is something more involved, e.g. a RIE chamber or (horrors) UHV, then I don't know--all the UHV stuff I've seen has been stainless steel.

Cheers,

Phil Hobbs

Reply to
Phil Hobbs

PolyTech Forum website is not affiliated with any of the manufacturers or service providers discussed here. All logos and trade names are the property of their respective owners.