nanoparticle production for Si

anyone know of any good resources for production of Si nanoparticles in the 5nm or less range which has the capacity to allow doping to be added during
the formation?
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Free floating: 1. Arc discharge. 2. SiH4 pyrolysis.
Embedded: 1. Ion implantation 2. Precipitatioin from supersaturated solid solution.
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