Hi,
does anybody know, if it is possible to grow RuO2 thin films by using a RuO2 sputtering target, but without using oxygen as a reactive gas? Only with a argon plasma....
Thanks a lot.
Christian
Hi,
does anybody know, if it is possible to grow RuO2 thin films by using a RuO2 sputtering target, but without using oxygen as a reactive gas? Only with a argon plasma....
Thanks a lot.
Christian
Have something to add? Share your thoughts — no account required.
Ask the community — no account required