Hello,
I am looking for a process to deposit a thick (50=B5m and more)
conformal coating of teflon (or any other high temp polymer) on a
polyimide substrate. The process should not raise the temperature of
the substrate above 100=B0C. CVD and PECVD is used for low-k teflon on
wafers but these guys work on thin films (below the =B5m). Any
sources...??
- posted
15 years ago