How do you fabricate floating-gate transistors?

I'm assuming it's similar to the steps to fabricate a MOSFET but I need the information for a briefing/paper I'm writing so I need a
source that's better than "my best guess".
Basically, just a generic step-by-step on how floating-gate transistors are made and what techniques are commonly used. I'd appreciate if someone could point me to a resource/reference because I'm having a hard time using, wiki, search engines, IEEE, other journal article search tools, and <gasp> the library.
Thanks, Eric
Add pictures here
<% if( /^image/.test(type) ){ %>
<% } %>
Add image file
Upload is a website by engineers for engineers. It is not affiliated with any of manufacturers or vendors discussed here. All logos and trade names are the property of their respective owners.