Help with SILVACO - Athena

Jan 25, 2007 2 Replies

Hi all , I am student from univesity and using the SILVACO software to simulate processing for device. If any one knows regarding SILVACO, my question is directed to them. I am trying to deposit a layer who's acts like a resistor and who's bulk resistance is between 500 ohm to 1 megohm. Also over that I wanted to deposit the layer of PbSe but I when I am using the command deposit in Athena for "My Material" it isn't working Please if somebody can help me out regarding this.



Shantanu Gupta Boise State University MS EE



Hi all , I am student from univesity and using the SILVACO software to simulate processing for device. If any one knows regarding SILVACO, my question is directed to them. I am trying to deposit a layer who's acts like a resistor and who's bulk resistance is between 500 ohm to 1 megohm. Also over that I wanted to deposit the layer of PbSe but I when I am using the command deposit in Athena for "My Material" it isn't working Please if somebody can help me out regarding this.

Shantanu Gupta Boise State University MS EE

Hi all , I am student from univesity and using the SILVACO software to simulate processing for device. If any one knows regarding SILVACO, my question is directed to them. I am trying to deposit a layer who's acts like a resistor and who's bulk resistance is between 500 ohm to 1 megohm. Also over that I wanted to deposit the layer of PbSe but I when I am using the command deposit in Athena for "My Material" it isn't working Please if somebody can help me out regarding this.

Shantanu Gupta Boise State University MS EE

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