Selective etch for InGaAs/InGaAsP

- T
- Tansen Varghese
  
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20 years ago

Fri, Jul 18, 2003 10:22 PM

Anyone know of an etch for InGaAs and InGaAsP that stops on InP, and gives a non-re-entrant profile for a circular mesa? Thanks, Tansen.

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