CV-measurements in MOS/MIS: accumulation characteristics

Hi,

Does anybody has explanation for a non-saturation behavior in the accumulation region of the Capacitance-Voltage characteristics of an MOS-device:

2 possibilities: 1)C raises with raising voltage and does not saturate 2) C first raises, saturates, and then breaks down.

Does anybody has a good reference?

Thanks!

Sincerely, Stephan

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stephan.abermann
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